Micro-Optics for Photolithography

Micro-layered-photolithography for Micro- Fabrication and Micro-molding

A novel process based on the principle of layered photolithography has been proposed and tested for making three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dim...

Alignment Procedures for Micro-optics

The alignment procedure is an important step in the process chain of the assembly of micro-optical components and has a direct impact on the system performance of the micro-optical system, the necessary assembly time and the manufacturing costs. For these reasons, only alignment procedures that are adapted to the special requirements of each assembly task will be able to save costs and attain t...

1 Tunable Micro - optics

Silicon micro-optics for smart light control

We present an overview of the results of our recent research in the field of adaptive optical components based on silicon microtechnologies, including membrane deformable mirrors, spatial light modulators, liquid-crystal correctors, wavefront sensors, and both spherical and aspherical micro-optical components. We aim at the realization of adaptive optical systems using standard-technology solut...

Integrated Micro-Optics for Microfluidic Systems

Microfluidic systems have a large variety of applications in biomedicine and life sciences. One of the problems occurring in practical systems is the adhesion of cells and micro-particles to the walls of microfluidic channels and reservoirs. For scientific examinations, e.g. for drug testing, it is necessary to expose specific test cells to different media. The cells are moved between the reser...